ITEMS SPEC TEST METHOD   Growth Technique   CZ   -   Diameter   100±0.2mm   ASTM F 613   Type/Dopant   P.P+/Boron   N/Phosphorus   N+/Antimony   ASTM F 42   Resistivity      ASTM F 673   p,p+   0.01-70Ωcm      N   0.01-40Ωcm      N+   0.005-0.05Ωcm      Crystal Orientation   (100)/(100)   ASTM F 26   Orientation Flat   SEMI-STD or Custom   ASTM F 847   Oxygen(New ASTM)   10-18ppma(Range of target value)   ASTM F 1188   Thickness   SEMI-STD or Custom   ASTM F 533   Laser Marking   SEMI-STD or Custom      Warp   < 30.0μm   ASTM F 657/F 534   Flatness         Global TTV   < 4.0μm   ASTM F 657   Global TIR   < 4.0μm   ASTM F 1530 Diameter Diameter 50mm 75mm 100mm 125mm 150mm 200mm 300mm Orientation 100 111 110 Type/Dopantt P(Boron) N(Phosphours) N(Antimony) Resistivity Ω- cm Thickness μm Surface Single side Polishde Double side Polishde Quantity pcs Remark Name Company Division Addr E-mail Tel H/P Fax